Proteus inspection

Wafer Micro/Macro Inspection Station

Proteus Inspection is a dedicated micro and macro inspection station for silicon wafers.

It is based on the modular Proteus architecture, which ensures the possibility to build machines according to customer needs in a really flexible and easy way.

Proteus Inspection is available in different versions, from the bare microscope loader to more complex systems including macro inspection unit, optical centering and alignment unit and automatic wafer inspection X/Y programmable stages.

The architecture is based on a number of integrated components, with dedicated mechanics and control system with a central PC based control.

All modules include the latest developments of wafer handling, such as integrated laser mapping, optical measurement systems and object based interface software.

Proteus Inspection is available in a table top version or directly mounted on a vibration free granite workbench, which can be customized according to customer needs.

Also available are a software system to collect and process statistics and quality data, and an integrated SPC system to best control process quality and trends.

Computer interface is in all cases extremely simple and user friendly, not requiring any special training for operators.

MAIN FEATURES

Wafer size up to 8” depending on version (special 12” version on request)

Table top or complete station versions available

3 Axis, Step Motor Driven

Computer Control

Laser Mapping

Options: Macro inspection with optical centering/aligning system, X/Y programmable inspection stage, data collection software, integrated SPC software

Dimensions:  700 mm W, 450 mm D, 500 mm H (plus computer and monitor, - 6” version)

Facilities: 220 Vac, 0,5 Kw,  Air pressure 6 Bar, Standard line vacuum