Proteus Macro Inspection

AUTOMATIC WAFER MACRO INSPECTION MACHINE

Proteus Macro Inspection is a , table top machine for wafer macro inspection

It have been especially studied for all that cases where is required a simple, and high performance wafer front inspection tool.

 It features wafer tilt and rotation to optimize collimated light inspection and is mounted on a granite basement and closed in a stainless steel cover.

System is computer controlled, and its use and programming is really easy and user friendly. It is possible to edit and recall recipes, and each one includes inspection strategies (all wafers, fixed wafers and random access for statistical inspection) and handling parameters.

MIS Proteus Macro is available in different versions, for wafers up to 8" (standard).

The use of our solid state illuminators and especially the pure green wide unit complete the machine with the right choice of tool for inspection.

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