Proteus Auto Inspection

Programmable pattern inspection system

Proteus Auto Inspection is a tool intended to perform automatic inspection tasks on wafers and substrates.

Proteus Auto Inspection is intended to act as a "building block" for advanced automatic inspection systems.

It features an automatic loading system for wafes, with wafer mapping, and a programmable microscope stage with its loading arm, together with a powerful software interface.

System is intended to mount digital video acquisition systems, with its illuminators,  to get images from the inspection for further analysis, and have been designed especially to act as an interface for automatic vision systems.

Another application is about simple visual inspections, which can be performed by a video microscope, or quality control systems, integrating an optional data entry software.

It is also capable to handle thin wafers and can be customized according to customer needs.