MIL8000 Inspection

AUTOMATIC WAFER MICRO MACRO AND BACK INSPECTION TOOL

 Proteus Inspection is a compact, table top machine for wafer inspection

It is designed to be a macro and back inspection tool, and to act as a microscope loader for a complete wafer inspection.

The tool is equipped with the most updated handling systems ad features laser mapping, recipe selection and optional SPC software.

This equipment have been designed to fulfill the needs of short cycle times as well as the increasing difficulties due to thin wafers handling.

Such needs required a careful design, based on the state of the art technological solutions for both mechanics and control system.

Proteus Loader, in its fully equipped version, features micro and macro inspection capabilities, including a backside inspection with the full view of wafer bottom.

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